FIB (Focused Ion Beam) 鑱氱劍闆㈠瓙鏉熸妧琛撶偤鑺墖鐮旂櫦鍜岃姱鐗囧埗閫犻亷绋嬫彁渚涗簡鑷抽棞閲嶈鐨勮紨鍔╂敮鎾�銆傚畠鐨勫熀鏈師鐞嗘槸锛氶潨闆婚�忛彙鑱氱劍鐨勯珮鑳介噺閹甸洟瀛�, 缍撻珮澹撻浕鍫村姞閫熷悗鎾炴搳瑭︾墖琛ㄩ潰锛屽湪鐗瑰畾姘ｉ珨鍗斾綔涓嬬敘鐢熷湒鍍忓苟绉婚櫎鎴栨矇娣�锛堥�ｆ帴锛夌墿璩�傝┎鎶�琛撳唬娉涙噳鐢ㄤ簬鎺╂ā淇銆侀浕璺慨鏀瑰拰澶辨晥鍒嗘瀽銆傜櫨闈堝▉寰炵編鍦婼TREM 鍏徃寮曢�睩IB 娣卞堡寰矇绌嶉珮绱旀湁姗熼噾灞簮锛屽搧绋锛屽寘瑁濆叏锛屽彲婊胯冻瀹㈡埗鐨勫悇绋渶姹�銆�
鈻� 鐢㈠搧鍒楄〃
| 鐢㈠搧绶ㄨ櫉 |
閲戝爆娌夌⿳鐗� |
鐢㈠搧鍚嶇ū |
鍖呰 |
| 78-1350 |
Pt |
锛堜笁鐢插熀锛夌敳鍩虹挵鎴婁簩鐑熀閴�(IV)
(Trimethyl)methylcyclopentadienylplatinum(IV), 99% |
2 g
5 g |
| 98-4024 |
Pt |
(Trimethyl)methylcyclopentadienylplatinum(IV), 99%, 78-1350, contained in 50 mL
Swagelok® cylinder for CVD/ALD |
10 g |
| 74-2202 |
W |
鍏景鍩洪帰
Tungsten carbonyl, 99% (99.9+%-W) sublimed |
5 g
25 g |
| 98-4036 |
SiO2 |
3-Aminopropyltriethoxysilane, 98%, 93-1402, contained in 50 mL Swagelok® cylinder for CVD/ALD |
25 g |
| 79-1600 |
Au |
浜岀敳鍩猴紙涓夋盁涔欓叞涓欓叜锛夐噾(II)
Dimethyl(trifluoroacetylacetonate)gold(III), 98%(99.9%-Au) |
500 mg
2 g |
| 29-2928 |
Cu |
闆欙紙鍏盁涔欓叞涓欓叜锛夊悎閵�(II)
Copper(II) hexafluoroacetylacetonate, anhydrous, elec. gr. (99.99+%-Cu) PURATREM |
1 g
5 g |
鈻� 閰嶅鍒昏潟姘ｉ珨
| 鐢㈠搧绶ㄨ櫉 |
鐢㈠搧鍚嶇ū |
鍖呰 |
| 54-1500 |
浜屾盁鍖栨皺 Xenon(II) fluoride, 99.5% |
2 g
10 g |
鈥绘洿澶氱敘鍝佽珛鑱郴瀹㈡湇鍨傝锛�