鐧鹃潏濞佺鎶�鏈夐檺鍏徃鍓电珛浜�1992 骞�锛屽绲備互“鐐虹鐮斿拰鐢熺敘闋樺煙鎻愪緵涓栫晫涓�娴佺殑鎶�琛撶敘鍝佸拰涓栫晫涓�娴佺殑鏈嶅嫏”鐐哄畻鏃紝鑷村姏浜庤秴绮剧窗鍖栧鍝佺殑鐮旂櫦鑸囧埗閫�銆傜洰鍓�锛岀櫨闈堝▉宸插叿鍌欑偤鍖栧銆佸垎鏋愩�佺敓鐗�銆佹潗鏂欍�佺墿鐞嗗強钘ョ墿鐮旂櫦绛夐牁鍩熸彁渚涜繎50钀ó鐢㈠搧鍜屽皥妤湇鍕欑殑鑳藉姏銆�
鍏変紡鐢㈡キ涓�鐩存槸鐧鹃潏濞侀噸榛為棞娉ㄧ爺绌剁殑鎶�琛撻牁鍩�锛岀稉閬庡骞寸殑鐧煎睍锛岀櫨闈堝▉鍙彁渚涜繎20绋珮绱旀埃楂旇垏2000浣欑ó鐮旂櫦鍙婄敓鐢㈠皥鐢ㄥ寲瀛哥敘鍝併�傚悓鏅傛牴鎿氬鎴堕渶姹傦紝閭勫彲閫茶涓嶅悓姣斾緥鍜岀磾搴︾殑娣峰悎姘ｉ珨瀹氬埗锛岀敘鍝佺磾搴︽渶楂樺彲閬�7N锛�99.99999%锛�銆傜櫨闈堝▉鐨勯珮鍝佽唱鐢㈠搧鑸囧皥妤妧琛�锛屾寮曢牁绁栧湅鍏変紡琛屾キ杩呴�熺櫦灞曘��
鎺ㄨ枽鐢㈠搧
|
鑻辨枃鍚嶇ū
|
TMB/Trimethylboron
|
BBr3/Boron Tribromide
|
DEZ/Diethylzinc
|
|
涓枃鍚嶇ū
|
涓夌敳鍩虹〖
|
涓夋捍鍖栫〖
|
浜屼箼鍩洪媴
|
|
CAS
|
|
|
|
|
鍒嗗瓙閲�
|
55.92
|
250.52
|
123.49
|
|
娌搁粸
|
-20.2鈩�
|
91鈩�
|
118鈩�
|
|
鐔旈粸
|
-161.5鈩�
|
-46鈩�
|
-28鈩�
|
|
瀵嗗害
|
2.3 g/L锛�21鈩冿級
|
2.7
|
1.2065
|
|
鍖呰瀹归噺
|
3.4 L/10 L/47 L
|
2.5 kg/鐡�
|
456 L/345 kg
|
|
鍖呰鏉愯唱
|
閲戝爆Mn
|
鐭宠嫳鎴栫〖纭呯幓鐠�
|
涓嶉姽閶�
|
|
绱斿害
|
锛�99.5% 鍙帴鍙楃壒娈婂畾鍒�
|
99.999 wt% as metals
|
99.98 wt% as metals
|
|
婵冨害
|
0.5%~5%姘埃娣峰悎鐗�
|
|
|
鏇村鐗圭ó姘ｉ珨鐢㈠搧鍙奝ECVD銆丄LD銆丆VD鍜孧OCVD婧�锛岃珛娲界櫨闈堝▉瀹㈡埗鏈嶅嫏灏堝摗
鍏ㄥ鐢㈠搧
|
鑻辨枃鍚嶇ū
|
涓枃鍚嶇ū
|
CAS
|
|
TMB /Trimethylboron
|
涓夌敳鍩虹〖
|
|
|
BBr3 /Boron Tribromide
|
涓夋捍鍖栫〖
|
|
|
Boron Trichloride
|
涓夋隘鍖栫〖
|
|
|
Boron Trifluoride
|
涓夋盁鍖栫〖
|
|
|
DMZn /dimethylzinc
|
浜岀敳鍩洪媴
|
|
|
DEZ /Diethylzinc
|
浜屼箼鍩洪媴
|
|
|
TMGa /Trimethylgallium
|
涓夌敳鍩洪幍
|
|
|
TEGa /Triethylgallium
|
涓変箼鍩洪幍
|
|
|
TMAl /Trimethylaluminium
|
涓夌敳鍩洪媮
|
|
|
Tmin /Trimethylindium
|
涓夌敳鍩洪姦
|
|
|
TiCl4 /Titanium Tetrachloride
|
鍥涙隘鍖栭垿
|
|
|
CP2Mg /Bis(cyclopentadienyl)magnesium
|
浜岃寕閹�
|
|
|
TDMAT /Tetrakis(dimethylamino)titanium
|
鍥�(浜岀敳姘ㄥ熀锛夎偨
|
|
|
Glass Etch
|
鐜荤拑铦曞埢鍔�
|
N/A
|
|
Hydrochloric Acid
|
姘寲姘�
|
|
|
Hydrofluoric Acid
|
姘熷寲姘�
|
|
|
Hydrogen Peroxide
|
閬庢哀鍖栨矮
|
|
|
Isopropyl Alcohol
|
鐣颁笝閱�
|
|
|
Nitric Acid
|
纭濋吀
|
|
|
Phosphoric Acid
|
纾烽吀
|
|
|
Water /HF
|
姘盁閰告按婧舵恫
|
|
|
Argon
|
姘埃
|
|
|
Helium
|
姘︽埃
|
|
|
Hydrogen
|
姘埃
|
|
|
Ammonia
|
姘ㄦ埃
|
|
|
Nitrogen
|
姘埃
|
|
|
Nitrous oxide
|
绗戞埃
|
|
|
Nitrogen trifluoride
|
涓夋盁鍖栨爱
|
|
|
Oxygen
|
姘ф埃
|
|
|
Phosphine
|
纾风兎
|
|
|
Phosphine Mix
|
纾风兎娣峰悎姘�
|
N/A
|
|
Silane
|
纭呯兎
|
|
|
Silane Mix
|
纭呯兎娣峰悎姘�
|
N/A
|
|
Silicon tetrachloride
|
鍥涙隘鍖栫
|
|
|
Silicon tetrafluoride
|
鍥涙盁鍖栫
|
|
|
Trichlorosilane
|
涓夋隘纭呯兎
|
|
|
Dichlorosilane
|
浜屾隘纭呯兎
|
|
闄勯寗锛氱敘鍝佺磾搴﹀垎绱�
|
Grade
|
Purity
|
Total Impurities
|
|
7N
|
99.99999%
|
100 ppb
|
|
6N
|
99.9999%
|
1 ppm
|
|
5N5
|
99.9995%
|
5 ppm
|
|
5N
|
99.999%
|
10 ppm
|
|
4N5
|
99.995%
|
50 ppm
|
|
4N
|
99.99%
|
100 ppm
|
|
3N5
|
99.95%
|
500 ppm
|
|
3N
|
99.9%
|
1000 ppm
|